JPH0571136B2 - - Google Patents
Info
- Publication number
- JPH0571136B2 JPH0571136B2 JP2756786A JP2756786A JPH0571136B2 JP H0571136 B2 JPH0571136 B2 JP H0571136B2 JP 2756786 A JP2756786 A JP 2756786A JP 2756786 A JP2756786 A JP 2756786A JP H0571136 B2 JPH0571136 B2 JP H0571136B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- boat
- chamber
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 105
- 230000007246 mechanism Effects 0.000 claims description 67
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000009832 plasma treatment Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 1
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2756786A JPS62185323A (ja) | 1986-02-10 | 1986-02-10 | 半導体ウエハ−のプラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2756786A JPS62185323A (ja) | 1986-02-10 | 1986-02-10 | 半導体ウエハ−のプラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62185323A JPS62185323A (ja) | 1987-08-13 |
| JPH0571136B2 true JPH0571136B2 (en]) | 1993-10-06 |
Family
ID=12224600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2756786A Granted JPS62185323A (ja) | 1986-02-10 | 1986-02-10 | 半導体ウエハ−のプラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62185323A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2668002B2 (ja) * | 1988-03-11 | 1997-10-27 | 東京エレクトロン株式会社 | ウエハ移送装置 |
-
1986
- 1986-02-10 JP JP2756786A patent/JPS62185323A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62185323A (ja) | 1987-08-13 |
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